Growth of TiN and ZrO2 Thin Films Using Thin Film Templates
碩士 === 國立清華大學 === 工程與系統科學系 === 97 === This study developed a two-step method to control the growth of TiN and ZrO2 thin films using thin film templates and explored the effects of template on the structure and properties of the derivative thin films. The experiment was divided into two parts. The fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61382518230180369445 |