Design and Fabrication of Pitch and Blaze-Angle Tunable Grating Device
博士 === 國立清華大學 === 動力機械工程學系 === 97 === This study aims at developing a novel pitch and blaze angle tunable grating device via Micro-Electro Mechanical Systems (MEMS) technologies. Grating is a powerful optical component for dispersing incident ray into specific angular direction corresponding to indi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/46360517321306562043 |