Design and Fabrication of Pitch and Blaze-Angle Tunable Grating Device

博士 === 國立清華大學 === 動力機械工程學系 === 97 === This study aims at developing a novel pitch and blaze angle tunable grating device via Micro-Electro Mechanical Systems (MEMS) technologies. Grating is a powerful optical component for dispersing incident ray into specific angular direction corresponding to indi...

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Bibliographic Details
Main Authors: Yang, Yu-Sheng, 楊裕勝
Other Authors: Liu, Cheng-Hsien
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/46360517321306562043