Measurement of Plasma Characteristics of the Large Area Parallel Inductively-Coupled Plasma Source

碩士 === 國立清華大學 === 物理學系 === 97 ===

Bibliographic Details
Main Authors: Lin, Wei-Chih, 林偉智
Other Authors: Kou, Chwung-Shan
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/73636527658831040432
Description
Summary:碩士 === 國立清華大學 === 物理學系 === 97 ===