Measurement of Plasma Characteristics of the Large Area Parallel Inductively-Coupled Plasma Source
碩士 === 國立清華大學 === 物理學系 === 97 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73636527658831040432 |