Study on the Microstructure and Properties of Multi-element Carbide and Carbonitride Thin Films

碩士 === 國立清華大學 === 材料科學工程學系 === 97 ===

Bibliographic Details
Main Author: 劉庭瑋
Other Authors: 林樹均
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/79875244222930794747