電子束照射對二次離子質譜儀之二次離子產出增加量之研究
博士 === 國立清華大學 === 材料科學工程學系 === 97 === In this thesis, we study the positive secondary ion yield enhancement by addition electron beam irradiation in regular secondary ion mass spectrometry (SIMS) measurements. Secondary ion emission was enhanced by electron beam in a typical SIMS operation, which wa...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/57015545351056888127 |