Growth of ZnO Nanotubes by CO2 Supercritical Fluid Treatment at Low-Temperature
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 97 === A low-temperature method, supercritical CO2 fluid (SCCF) technology, was applied for oxidation of metal Zn film on glass substrate at 60°C. In this study, Zn film was deposited by DC sputtering at room temperature and post-treated by SCCF, which is mixed wit...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/227p9k |