NBTI characteristics of p-MOSFETs under external mechanical stress

碩士 === 國立中山大學 === 物理學系研究所 === 97 === In this thesis, in order to eliminate process issue, an external mechanical uniaxial tensile and compressive stress applied on p-type metal-oxide-semiconductor field effect transistors (p-MOSFETs) is used for the study of negative bias temperature instability (NB...

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Bibliographic Details
Main Authors: Po-wen Hsiao, 蕭博文
Other Authors: Ting-Chang Chang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/3n9r6t