Mapping of ESD Induced Defects on LEDs with Optical Beam Induced Current Microscopy
碩士 === 國立中山大學 === 光電工程學系研究所 === 97 === Optical beam induced current (OBIC) mapping has found wide-spread applications in characterizing semiconductor devices and integrated circuitry. In this study, we have used a two-photon scanning microscope to investigate InGaN light emitting diodes (LED). The d...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/ey93rt |