Treatment of Chemical Mechanical Polishing Wastewater by Polyelectrolyte Enhanced Electro-Coagulation-Flotation and Ultrafiltration Process
碩士 === 國立屏東科技大學 === 環境工程與科學系所 === 97 === Water conservation and wastewater reclamation have been an important issue of various hi-tech industries such as chemical mechanical polishing (CMP) process in semi-conductor industry in Taiwan. In smoothening processes of wafers, huge amount of ultra-pure wa...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/16309393175929536896 |