Design and Fabrication of micro mirrors, and their reflectivity analysis
碩士 === 國立屏東科技大學 === 機械工程系所 === 97 === This paper focuses on the design and manufacture of a micro-mirror, by means of Surface Micromachining, and the use of MENS to manufacture optical components of micro-mirror. The paper employs 8, 10, and 12 cantilever beams, which are gold-plated to act as the m...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/31271948598015302277 |