The Study on fabriation of Sol-Gel-Glass Microlens Arrays
碩士 === 國立東華大學 === 材料科學與工程學系 === 97 === In this thesis, SiO2/ZrO2 sol-gel was prepared to act as a negative type photoresist, in order to fabricate sol-gel-glass microlenses on different types of substrates. A polydimethylsiloxane (PDMS) mold with concave microlenses on its surface was made by the co...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61508519692013869349 |