Characteristics of GZO (ZnO:Ga) Thin Films by Pulsed Laser Deposition
碩士 === 國立嘉義大學 === 光電暨固態電子研究所 === 97 === In this study, Pulsed laser deposition (PLD) technique is used to deposited Gallium-doped ZnO (GZO) thin films on glass substrates with various substrate temperatures and dopant concentration. The composition, structural, electrical and optical properties were...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/fjb767 |