Processes of Soft-Mold Ultraviolet Lithography
碩士 === 國立彰化師範大學 === 顯示技術研究所 === 97 === We use soft ultraviolet nanoimprint lithography (Soft UV-NIL), at room temperature and low-pressure, the miniature patterns are imprinted on the plastic substrate, polyethylene terephthalate (PET). The polydimethylsiloxane (PDMS) with the flexible and transpare...
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| Format: | Others |
| Language: | zh-TW |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85786658031603118798 |