Design and Research on Micro Mirror Scanning System
碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === Abstract In recent years, the actuator of micro mirror of electrostatic actuation is one of the main products for the industrial application and mass production in the MEMS field. This device is requested to project light source accurately onto the high reflecti...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81611775760850490682 |