Fabrication and Optoelectronic Properties ofLow-Dimensional SiGe Nanostructures by UsingSelf-assembled Nanomasks
碩士 === 國立中央大學 === 材料科學與工程研究所 === 97 === In the present study, large-area Si nanotips were fabricated by selective chemical etching of self-assembled Ge quantum dots on Si. Taking advantage of the relatively low etching rate, high-density Ge dots act as virtual nanomasks for the underlying Si substra...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50416886224720264631 |