The Study of Al-Ge Thin Films on Package
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 97 === Eutectic bonding is one of the methods among MEMS packaging, and hermetic sealing is an essential consideration. Although polymer material offers a low temperature progress, however, particles and moisture would penetrate through the loose molecular structur...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qu9zvq |