Fabrication and characterization of Si nanocrystals thin films
碩士 === 國立交通大學 === 顯示科技研究所 === 97 === In this thesis, SRO (silicon rich oxide)/SiO2 multilayer structure was first grown by magnetron sputtering, and then, Si NCs precipitated through high temperature annealing process. By using Fourier transform infrared spectroscopy (FTIR), we identify the formatio...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/71085727980602191038 |