Evaluations of the Leakage Current and Reliability on NILC-LTPS TFTs
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 97 === TFT display panels are widely used for consumer products on worldwide market. Among various techniques of fabricating Low Temperature Polycrystalline Silicon(LTPS) thin film to obtain higher performance TFTs, Nickel metal-Induced Lateral Crystallizat...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87511909053949182271 |