Product-based adaptive disturbance estimation for run-to-run control of semiconductor processes
碩士 === 國立交通大學 === 機械工程系所 === 97 === In the last few years, Run-to-Run (RtR) control techniques have been developed and used to semiconductor manufacturing processes to maintain process targets and improve product quality. There are many different products entering one tool to proceed the same proces...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65654025327724103850 |