Nano-Measurement Using Laser Diffractometer and Traceable Atomic Force Microscope

碩士 === 國立交通大學 === 機械工程系所 === 97 === A laser diffractometer can calibrate grating pitch, 2D grating angle, and measure the refractive index of liquids. The measurement principle is based on the Littrow configuration, in which a reflective diffraction beam coincides with an incident beam. The pitch va...

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Bibliographic Details
Main Authors: Tsai, Ming-June, 蔡明俊
Other Authors: Liu, Tzong-Shi
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/17610951458582715024