Regrowth of Thick Films on Free-Standing GaN Substrates by HVPE
碩士 === 國立交通大學 === 電子物理系所 === 97 === In this work, we study surface treatment of thermal annealing and re-grown of GaN thick films. The free-standing GaN substrates by laser lift-off technology, direct regrowth of GaN thick films will take place crack situation.Examine and analysis from PL and CL amo...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/24025721516299798701 |