Effects of Source and Drain Electrode Types on Bottom Contact Amorphous Indium-Gallium-Zinc-Oxide Thin-Film-Transostors
碩士 === 國立交通大學 === 光電工程系所 === 97 === Via investigating the oxygen and annealing effects, interface property, and source/drain materials, high performance a-IGZO TFT was fabricated. First, the oxygen flow rate was varied to examine oxygen absorption effect. Post-annealing improves the bonding in a-I...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28846510627800818106 |