Fabrication and Characterization of the Microcrystalline Silicon Thin Film Solar Cell
碩士 === 國立暨南國際大學 === 生物醫學科技研究所 === 97 === In this thesis, microcrystalline-silicon (uc-Si) thin films were deposited by using very high frequency (VHF) (27.12MHz) Plasma Enhanced Chemical Vapor Deposition (PECVD) and mc-Si solar cells were fabricated. Crystallinity of silicon films was examined by ch...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08341572823996807055 |