Investigation of Silicon Solar Cell using Laser Assisted Plasma Enhanced Chemical Vapor Deposition
碩士 === 國立成功大學 === 光電科學與工程研究所 === 97 === This research is on the laser assist PECVD deposited silicon film. And the change of silicon film structure was investigated. This research was discussing the crystalline and bond structure affected by different laser power density in detail. And the crystal g...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64859019763596260937 |