Tribological and drilling performance of DLC films with changed DC power frequency and substrate bias voltage
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 97 === The main purpose of this study is to research the tribological properties and cutting performance of a-C:H coatings prepared by sputtering graphite and Zirconium targets with unbalanced magnetron sputtering system. It contains two stages of research in the stu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94825563531028923246 |