A Study on a Piezo Actuated Motion Stage Using Fuzzy Integral Sliding Mode Controller
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 97 === Piezoelectric actuators are suitable for accurate positioning due to their high precision, light weight, fast response, and backlash-freeness. Since piezoelectric actuators possess high nonlinear hysteresis, the related control issues are investigated, and the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47087025449983581682 |