Carbon nanowalls grown by DC-PECVD and its field emission measurement
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === Carbon nanowalls were grown on silicon substrates by direct-current plasma enhanced chemical vapor deposition and measured the electron field emission of these coatings. It was found that the turn-on field could be as low as 1-2 V/um. After having successful...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91404662168487103434 |