Fabrication of Long Sub-micron Channels Using Patterned Microridges Generated by Inductively Coupled Plasma Process

碩士 === 國立成功大學 === 化學工程學系碩博士班 === 97 === Owing to its potential technology breakthrough to impact the human life, micro/nanotechnology has been heavily pursued in recent years. Study of fluidics at nanoscale is one of the research topics, which not only provides us with the opportunity to better und...

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Bibliographic Details
Main Authors: Yang-Chou Fang, 方彥朝
Other Authors: Yi-Je Juang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/47868807180882994119

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