Fabrication of Long Sub-micron Channels Using Patterned Microridges Generated by Inductively Coupled Plasma Process
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 97 === Owing to its potential technology breakthrough to impact the human life, micro/nanotechnology has been heavily pursued in recent years. Study of fluidics at nanoscale is one of the research topics, which not only provides us with the opportunity to better und...
Main Authors: | , |
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Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/47868807180882994119 |