Fabrication of Long Sub-micron Channels Using Patterned Microridges Generated by Inductively Coupled Plasma Process

碩士 === 國立成功大學 === 化學工程學系碩博士班 === 97 === Owing to its potential technology breakthrough to impact the human life, micro/nanotechnology has been heavily pursued in recent years. Study of fluidics at nanoscale is one of the research topics, which not only provides us with the opportunity to better und...

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Bibliographic Details
Main Authors: Yang-Chou Fang, 方彥朝
Other Authors: Yi-Je Juang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/47868807180882994119
Description
Summary:碩士 === 國立成功大學 === 化學工程學系碩博士班 === 97 === Owing to its potential technology breakthrough to impact the human life, micro/nanotechnology has been heavily pursued in recent years. Study of fluidics at nanoscale is one of the research topics, which not only provides us with the opportunity to better understand the flow behavior at nanoscale and explore new phenomena but also can be used for many applications such as separation, detection, and so on. However, unlike microfluidics, most of the research regarding nanofluidics has been found to relate to theoretical analyses and simulation due to lacking the easy access to nanochannels. In this study, we propose a relatively simple and less expensive alternative to fabricate long sub-micron channels. The microridges are first obtained through inductively coupled plasma- reactive ion etching (ICP-RIE) process, followed by spin-coating and casting of polydimethyl siloxane (PDMS). The results show that both one-step and two-step ICP-RIE processes can be applied to fabricate long microridges. For the one-step process, the surface of the microridges is smooth but the etching time is relatively difficult to control due to the wider mask used. For the two-step process, better control of etching time is possible; however, the surface of the microridges is relatively rough. The length of the microridges can reach up to 1 mm. Spin coating of PDMS on the microridges results in PDMS/microridges composite mold and the lower the spin speed, the lower the aspect ratio of the mold. The triangular shaped PDMS microchannels can be obtained by casting PDMS on the PDMS/microridges composite mold. After bonding, the dimensions of the sealed PDMS microchannels are further reduced because of the collapse of the microchannel edges. With pressure applied during bonding process, fabrication of long sub-micron PDMS channels can be achieved.