Optimal Dispatching Policy and Simulation Studies for Multi-Product Multi-Tool Semiconductor Manufacturing Processes
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 97 === Semiconductor manufacturing is one of the most fast-growing industries in today’s world. As feature sizes shrink and wafer sizes increase, intricate control methods are needed to improve the product quality and tools utilization. In this thesis, the semiconduc...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35119004324956175891 |