Design and Fabrication of Miniature Dynamic Microphones
碩士 === 國立中興大學 === 精密工程學系所 === 97 === This thesis is the first one that presents the design and fabrication of miniature dynamic microphones using micro-electro-mechanical system (MEMS) techniques. The bulk micromachining, surface micromachining and micro electroplating technique were applied to fabr...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/42404862096162680118 |