Integrated micro humidity sensor with polypyrrole and readout circuit
碩士 === 國立中興大學 === 機械工程學系所 === 97 === This study investigates a micro humidity sensor integrated with readout circuit, which is fabricated by the commercial CMOS (complementary metal oxide semiconductor) process. The sensing film of the humidity sensor is polypyrrole that is synthesized by oxidative...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/47107253839884560848 |