Micro pressure sensor with wireless transmission circuits
碩士 === 國立中興大學 === 機械工程學系所 === 97 === Wireless micro pressure sensors were manufactured using the standard 0.35 μm CMOS (complementary metal oxide semiconductor) process and a post-CMOS process. In this study, two different pressure sensors were designed, capacitive and FET (field effect transistor)...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/69900116715667200737 |