Development and Applications of Multi- Degree of Freedom Measurement Systems
碩士 === 明新科技大學 === 精密機電工程研究所 === 97 === This paper proposes two multi-degree of freedom positioning error measurement systems, including a dual-probe measurement system which has the capability to measure simultaneously 2-DOF motion errors of a linear stage, and a 6-beam laser measurement system wh...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80294644928660079495 |