Precise Measurements about the Three-dimensional Displacements of Objects
碩士 === 龍華科技大學 === 工程技術研究所 === 97 === This paper proposes a few cheap and non-contact methods to measure the in-plane and out-of-plane displacements of a measured object using a laser. All the average errors of the different measured displacements are smaller than 10nm. About the measurement for an o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99645525475888885481 |