Investigation into the effects of deposition parameters on TiO2 photocatalyst thin films by r.f. magnetron sputtering
碩士 === 龍華科技大學 === 工程技術研究所 === 97 === TiO2 photocatalyst thin films were deposited on non-alkali glass substrates by rf magnetron sputtering. Taguchi’s method with orthogonal array, signal-to-noise ratio and analysis of variance were employed to study the performance characteristics. The experimental...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85067626186199820942 |