The study on characteristic of doped nitrogen diamond-like carbon films by MPCVD
碩士 === 龍華科技大學 === 工程技術研究所 === 97 === This research studied nitrogen doped DLC (Diamond like carbon) film on the silicon wafer by MPCVD, at different parameters such as: substrate temperature, gas flow rate, and microwave power. The quality of DLC films was analyzed by the Scanning electron microscop...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50589982366455586465 |