Sol-gel PZT piezoelectric thin film on the application of inkjet technology

• Main Authors: Je-Yu Lin, 林哲宇
• Other Authors: Liren Tsai
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/72726493269635649844

碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 97 === In recent years, in order to develop actuators, MEMS (micro-electro-mechanical, MEMS) research has become a popular theme for ferroelectric PZT thin films of materials. PZT piezoelectric material which is piezoelectric, and will enable the exchange of mechanical energy and electrical energy. Piezoelectric material by academic and industry attention, due to high sensitivity, precision, high coefficient of electrical and mechanical advantages of pale pinkish purple. Recently, scientists also use properties of PZT piezoelectric MEMS integration process, produced a storage device. Renewable energy to combat global warming there is considerable help. This paper is based on the sol - gel method (sol-gel), Preparation ofpiezoelectric PZT thin film, PZT film with the decision of ferroelectric, dielectric and piezoelectric applications the possibility of assessment. Samples obtained by XRD for crystalline phase analysis, use SEM observation of film surface, at the same time measured hysteresis curve of the piezoelectric. The results, 550 ~ 650℃ to obtain the high-temperature structure of perovskitephase. Pt/Ti/SiO2/Si substrates annealed at 600 ℃, surveying the nature of the ferroelectric polarization can be the best residual electric field Pr=13.348μC/cm2