Sol-gel PZT piezoelectric thin film on the application of inkjet technology
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 97 === In recent years, in order to develop actuators, MEMS (micro-electro-mechanical, MEMS) research has become a popular theme for ferroelectric PZT thin films of materials. PZT piezoelectric material which is piezoelectric, and will enable the exchange of mech...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72726493269635649844 |