Study on the Material Properties of the P-Type ZnO Thin Film
碩士 === 國立高雄應用科技大學 === 電子工程系 === 97 === In this research, the zinc nitride (Zn3N2) thin films were deposited on the n-type Si(100) substrate by reactive RF magnetron sputtering. The N-doped ZnO were prepared by oxidation of Zn3N2 thin films.The optical and electrical properties of N-doped ZnO thin fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47617262814881710365 |