The Study of (100) Oriented AlN Thin Films by Reactive RF Magnetron Sputtering
碩士 === 國立高雄應用科技大學 === 電子工程系 === 97 === The (100) oriented AlN thin films have excellent bulk acoustic wave (BAW) and surface acoustic wave (SAW) properties. In this research, the (100) oriented AlN thin films were deposited on p-type (100) silicon substrate by RF magnetron sputtering. The dependence...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09083608365642123834 |