Study on the BAW and SAW Properties of the AlN and ZnO Thin Films
博士 === 國立高雄應用科技大學 === 電子工程系 === 97 === Bulk acoustic wave analysis of all crystalline plane oriented AlN and ZnO thin films were studied in this thesis. Different crystalline plane oriented AlN and ZnO thin films will form different vibration modes and acoustic properties. The (002), (004), and (006...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46539519589502545861 |