Thermal Stability of Aluminum Doped Zinc Oxide Thin FilmsAnalyzed by Thermal Desorption Method
碩士 === 崑山科技大學 === 電機工程研究所 === 97 === For evaluating thermal stability of aluminum doped zinc oxide(AZO)thin films, a series of AZO films with different processing recipe were measured with thermal desorption tool. Relative low thermal desorption and stable electrical, optical and materials propert...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/km2ba7 |