Investigation of SiO2 and TiO2 on AlGaAs Prepared by Liquid Phase Deposition
碩士 === 義守大學 === 電子工程學系碩士班 === 97 === In this thesis, we used liquid phase deposition (LPD) to deposit SiO2 and TiO2 oxide films on AlGaAs. The SiO2 and TiO2 films can be deposited on AlGaAs wafers only through immersion in mixed solution at low temperature (30-60℃). The surface morphologies of oxide...
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52736176939813278591 |