Investigations on Al0.2Ga0.8As/In0.2Ga0.8As δ-pHEMT with a Transparent AZO Gate

碩士 === 逢甲大學 === 電子工程所 === 97 === This work reports, a transparent Aluminum-doped zinc oxide (AZO) gate material deposited on AlGaAs/InGaAs δ-doped pseudomorphic high electron mobility transistors have been prepared by RF reactive magnetron sputtering system from an AZO target was prepared by mixing...

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Bibliographic Details
Main Authors: Bo-Yi Chou, 周伯羿
Other Authors: Ching-Sung Lee
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/53994451847737683806