Formation and Applications of Silicon-bsased Microporous Structures
碩士 === 逢甲大學 === 產業研發碩士班 === 97 === Based on microelectromechanical system (MEMS) and electrochemical etching technologies, the research studies the physical properties of micropore structures of silicon that are proved by designing micoresistors and microcapacitors. The advantages of the developed s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97232419338557980886 |