A Study of the Crystallization Methods on Gate-All-Around (GAA) Poly-Si Nanowire Thin-Film-Transistors

碩士 === 逢甲大學 === 產業研發碩士班 === 97 === Poly-Si thin film transistors (TFTs) have been widely used as switching elements in active-matrix displays. For applications on system-on-panel (SOP) and three-dimension integrated circuits (3-D ICs), further improvement of device performance are required. The mobi...

Full description

Bibliographic Details
Main Authors: Chia-Min Lin, 林家名
Other Authors: Tsung-Kuei Kang
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/46138675336333852345