A Study of the Crystallization Methods on Gate-All-Around (GAA) Poly-Si Nanowire Thin-Film-Transistors
碩士 === 逢甲大學 === 產業研發碩士班 === 97 === Poly-Si thin film transistors (TFTs) have been widely used as switching elements in active-matrix displays. For applications on system-on-panel (SOP) and three-dimension integrated circuits (3-D ICs), further improvement of device performance are required. The mobi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/46138675336333852345 |