Investigation of photo-induced superhydrophilicity of TiO2-based thin films deposited by pulsed-DC reactive magnetron sputtering
碩士 === 逢甲大學 === 材料科學所 === 97 === This dissertation employs conventional- and pulsed-DC reactive (Ar/O2) sputtering deposition processes, in conjunction with in-situ monitors of (a) cathode voltage/current, (b) partial oxygen pressure, and (c) optical emission as a function of the value of oxygen flo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77296795213182088027 |